Conference chair
Prof. Syuhei Kurokawa (Kyushu University, Japan)
Co-chair
Prof. Michio Uneda (Kanazawa Institute of Technology, Japan)
Program chair
Prof. Norikazu Suzuki (Chuo University, Japan)
Executive committee
China
Xinchun Lu, Tsinghua University
Xin-Ping Qu, Fudan University
Europe
Viorel Balan, CEA-Leti
Knut Gottfried, Fraunhoffer ENAS
Japan
Syuhei Kurokawa, Kyushu University
Yukiteru Matsui, KIOXIA Corp.
Taiwan
Eddy Peng, Hermes-Epitek Corp.
Willie Pai, KINIK
Korea
Jingoo Park, Hanyang University
Taesung Kim, Sungkyunkwan University
United States
Gene Davis, Texas Instruments
Rob Rhoades, X-TrinSiC
Program committee
Europe
Catharina Rudolph, Fraunhofer IZM-ASSID
Eric Jacquinot, Merck KGaA
Patrick Ong, IMEC
Cedric Perrot, CEA/LETI
United States
Mark Buehler, Intel
Bradley Wood, Entegris
Don Frye, Entegris
Andrew Carswell, Micron
Japan
Michio Uneda, Kanazawa Institute of Technology
Kazumi Sugai, Fujimi Inc
Norikazu Suzuki, Chuo University
Yasuhisa Sano, Osaka University
Korea
Kwangsu Kim, Daelim University
Taegon Kim, Hanyang University
Sanha Kim, KAIST
Hyunseop Lee, Dong-A University
Taiwan
Kuo Chun Wu, Consultant
Chao-Cheng Arthur Chen, NTUST
Ming-shih Tsai, VERSUM Materials
China
Yuchun Wang, Anji Microelectronics
Baoguo Zhang, Hebei University of Technology
Weili Liu, Institute of Microsystems, CAS
Kun Li, Tianjin Hwatsing Technology
Tutorial committee
China
Baoguo Zhang, Hebei University of Technology
Europe
Patrick Ong, IMEC
Japan
Yohei Yamada, Western Digital GK
Taiwan
Chao-Cheng Arthur Chen, NTUST
Korea
Jingoo Park, Hanyang University
United States
Gene Davis , Texas Instruments
Organizing committee
Toshiro Doi, Kyushu University, Doi Laboratory
Hirokuni Hiyama, EBARA Corporation
Yohei Hashimoto, Kanazawa University
Akira Isobe, ISTL Co., Ltd.
Masaharu Kinoshita, Kinoshita Consulting
Seiichi Kondo, Resonac Corporation
Syuhei Kurokawa, Kyushu University
Yukiteru Matsui, KIOXIA Corporation
Hiroko Mikami, Global-net, Co. Ltd.
Hitoshi Morinaga, FUJIMI Incorporated
Kaho Nakaumra, Global-net, Co. Ltd.
Yasuhisa Sano, Osaka University
Kazumi Sugai, FUJIMI Incorporated
Norikazu Suzuki, Chuo University
Yasuhiko Takeno, Global-net, Co. Ltd.
Hiromu Takeno, Global-net, Co. Ltd.
Michio Uneda, Kanazawa Institute of Technology
Yutaka Wada, EBARA Corporation
Yohei Yamada, Western Digital GK