Call for Papers

ICPT 2023 provides the largest forum for academic researchers, industrial practitioners, and engineers from around the world dedicated to the exchange of information on the state-of-the-art in Chemical Mechanical Polishing (CMP) and other planarization technologies. Abstracts of new work are requested and can include the following topics relating to planarization:

  • Defects, reliability issues and Post CMP cleaning
  • CMP fundamentals, modeling and simulation
  • Equipment and metrology
  • Process control
  • Emerging technologies in CMP
  • CMP consumables
  • 3D ICs/TSV applications
  • Alternative CMP technologies
  • CMP for MEMS
  • Wafer polish such as Si, SiC, GaN and Diamond
  • Hybrid IC

Important Dates:

Abstract submission deadline

May 1, 2023 May 26, 2023 (Extended)

Notification of acceptance deadline

July 1, 2023

Extended abstract submission deadline

September 1, 2023


Abstracts should be a maximum of one page and a minimum of 200 words, written in English, and may include figures. Abstracts will be scored on the originality and significance of the work and the quality of the information and data presented. The ideal abstract will be for novel work in an area of great importance to the industry and will include the data to support the conclusions drawn. When submitting your abstract, please indicate your preference for oral or poster presentation and the targeted topic area.

Extended Abstract

After notification of acceptance of the abstract, authors must submit the extended abstract. Extended abstracts, including figures and references, will be limited to 4-8 pages for oral presenters and 3-4 pages for poster presenters. The full text of oral and poster presentations will be published in an electronic format to be determined and will be available to all participants.


Presentation of accepted abstracts at the conference must be in English. For Poster Presentations, the desired format is 32"x40" (813 mm x 1016 mm) as the standard size that most people will use. If you need to go bigger, 36" x 48" (915 mm x 1220 mm) is the maximum permitted.

Abstract Instructions

Abstract Instructions Format. WORD

Extended Abstract Instructions

Extended Abstract Instruction Format. WORD

Abstract submission

Submission Schedule:0:00 1 April, 2023(Sat) to 23:59 1 May , 2023(Mon) 26 May , 2023(Fri) (Extended)

Click here for abstract submission