ICPT 2023 provides the largest forum for academic researchers, industrial practitioners, and engineers from around the world dedicated to the exchange of information on the state-of-the-art in Chemical Mechanical Polishing (CMP) and other planarization technologies. Abstracts of new work are requested and can include the following topics relating to planarization:
- FEOL CMP
- BEOL CMP
- Defects, reliability issues and Post CMP cleaning
- CMP fundamentals, modeling and simulation
- Equipment and metrology
- Process control
- Emerging technologies in CMP
- CMP consumables
- 3D ICs/TSV applications
- Alternative CMP technologies
- CMP for MEMS
- Wafer polish such as Si, SiC, GaN and Diamond
- Hybrid IC
Important Dates:
Abstract submission deadline
May 1, 2023 May 26, 2023 (Extended)
Notification of acceptance deadline
July 1, 2023
Extended abstract submission deadline
September 1, 2023
Abstract
Abstracts should be a maximum of one page and a minimum of 200 words, written in English, and may include figures. Abstracts will be scored on the originality and significance of the work and the quality of the information and data presented. The ideal abstract will be for novel work in an area of great importance to the industry and will include the data to support the conclusions drawn. When submitting your abstract, please indicate your preference for oral or poster presentation and the targeted topic area.
Extended Abstract
After notification of acceptance of the abstract, authors must submit the extended abstract. Extended abstracts, including figures and references, will be limited to 4-8 pages for oral presenters and 3-4 pages for poster presenters. The full text of oral and poster presentations will be published in an electronic format to be determined and will be available to all participants.
Presentation
Presentation of accepted abstracts at the conference must be in English. For Poster Presentations, the desired format is 32"x40" (813 mm x 1016 mm) as the standard size that most people will use. If you need to go bigger, 36" x 48" (915 mm x 1220 mm) is the maximum permitted.
Abstract Instructions
Abstract Instructions Format. WORD
Extended Abstract Instructions
Extended Abstract Instruction Format. WORD
Abstract submission
Submission Schedule：0:00 1 April, 2023(Sat) to 23:59 1 May , 2023(Mon) 26 May , 2023(Fri) (Extended)